A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Paper
Experimental demonstration of the validity of accelerated radiation damage testing of x-ray mask materials
Abstract
No abstract available.
Related
Robert W. Keyes
Physical Review B
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
The DX centre
T.N. Morgan
Semiconductor Science and Technology