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R.E. Acosta- R.E. Acosta
- I. Babich
- et al.
- 1993
- MRS Spring Meeting 1993
- Shih-Liang Chiu
- Y.H. Jeng
- et al.
- 1990
- ISCAS 1990
- 1989
- Proceedings of SPIE 1989
- R.E. Acosta
- J.R. Maldonado
- et al.
- 1989
- Proceedings of SPIE 1989
- J. Cl. Puippe
- R.E. Acosta
- et al.
- 2019
- JES
- David Seeger
- Jennifer Lund
- et al.
- 2003
- Journal of Microlithography, Microfabrication and Microsystems
- David Seeger
- Jennifer Lund
- et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
- Cameron J. Brooks
- Lynn A. Powers
- et al.
- 1999
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures