A. Gangulee, F.M. D'Heurle
Thin Solid Films
An innovative method for fabrication and rapid prototyping of high-aspect ratio micromechanical components in photoresist is discussed. The photoresist is an epoxynegative-tone resist, called SU-8, which can be structured to more than 2 mm in thickness by UV exposure. Small gears of 530 μm in diameter and 200 μm in thickness have been realized in this photoplastic and their functionality has been demonstrated. In addition a process called MIMOTEC™ (MIcroMOlds TEChnology) has been established for the fabrication of metallic micromolds. MIMOTEC™ is based on the use of the SU-8 spun on high thicknesses and electrodeposition of nickel. Thermoplastic microcomponents have been injected and mounted in watches.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Imran Nasim, Melanie Weber
SCML 2024
David B. Mitzi
Journal of Materials Chemistry
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting