J. Tersoff
Applied Surface Science
The transformation of cleaved Si(111)2×1 surfaces into apparent 1×1, 5×5, and 7×7 structures has been studied with the scanning tunneling microscope. Two reaction paths are identified, one proceeding through a disordered adatom arrangement into the 7×7 structure, and the other proceeding directly from 2×1 into the 5×5 structure. Near a nucleation site (step or domain boundary), the first path is favored due to the abundance of adatoms on the surface, and far from a nucleation site the second path dominates. © 1990 The American Physical Society.
J. Tersoff
Applied Surface Science
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SPIE Advanced Lithography 2008
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SCML 2024
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