Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
In this paper we show that the ideal of any algebraic curve in affine 3-space whose Jacobian matrix has rank at least 1 at every singular point of the curve can be generated by three polynomials and we give constructive procedures to compute such generators. © 2009 Elsevier Ltd. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Imran Nasim, Michael E. Henderson
Mathematics
Amir Ali Ahmadi, Raphaël M. Jungers, et al.
SICON
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena