Douglas S. Goodman
Microelectronic Engineering
For the partially coherent imaging of narrow clear lines, the image maximum relative to the nominal and the lateral shift of the maximum is considered as a function of pupil phase. © 1994 Optical Society of America.
Douglas S. Goodman
Microelectronic Engineering
Douglas S. Goodman
Applied Optics
Douglas S. Goodman, Alan E. Rosenbluth
Proceedings of SPIE 1989
Douglas S. Goodman
Applied Optics