Scanning excimer ablation system
- Douglas S. Goodman
- Thomas Ainsworth
- et al.
- 1992
- LEOS 1992
Publications
Date
Featured collections
Popular topics
22 results for Douglas S. Goodman
Condenser aberrations in Köhler illumination
- Douglas S. Goodman
- Alan E. Rosenbluth
- 1989
- Proceedings of SPIE 1989
Bench evaluation of lithographic lenses from measurements of the point spread function
- Norman Bobroff
- Petra Fadi
- et al.
- 1989
- Proceedings of SPIE 1989
TUTORIAL ON ILLUMINATION FOR OPTICAL INSPECTION AND MACHINE VISION: PART 1. .
- Douglas S. Goodman
- 1986
- Topical Meeting on Machine Vision 1986
Large-field scanning laser ablation system
- F.E. Doany
- T. Ainsworth
- et al.
- 1997
- IBM J. Res. Dev
Line ratio and image formation in photolithographic projectors
- Joseph E. Gortych
- Douglas S. Goodman
- 1994
- Applied Optics
Heights and positions of maxima of partially coherent images of clear lines
- Douglas S. Goodman
- Joseph E. Gortych
- 1994
- Applied Optics
Calibration of a computer controlled robotic vision sensor with a zoom lens
- Konstantinos Tarabanis
- Roger Y. Tsai
- et al.
- 1994
- Computer Vision and Image Understanding
Calibration of a Computer Controlled Robotic Vision Sensor with a Zoom Lens
- K. Tarabanis
- R.Y. Tsai
- et al.
- 1994
- CVGIP: Image Understanding
Machinable glass ceramic: A useful optical material
- Douglas S. Goodman
- 1986
- Applied Optics