Hiroyuki Hiraoka
J. Photopolym. Sci. Tech.
A few micron wide and thick polymer lines are formed from a monomer, methacrylic anhydride, according to a metal pattern of a mask under high-energy radiation, such as γ rays. The resolution is limited only by the mask configuration; with our present mask configuration it is better than ∼2000 Å. The polymerization is initiated by electrons ejected from metal lines.
Hiroyuki Hiraoka
J. Photopolym. Sci. Tech.
Hiroyuki Hiraoka, Wen-yaung Lee
Macromolecules
Hiroyuki Hiraoka, Uri Ladabaum
Japanese Journal of Applied Physics
Hiroyuki Hiraoka, Tsuguo Yamaoka
Microelectronic Engineering