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Hiroyuki Hiraoka- H. Hiraoka
- R.K. Nesbet
- et al.
- 1977
- Physical Review Letters
- H. Hiraoka
- A.M. Patlach
- et al.
- 1989
- Proceedings of SPIE 1989
- J. Krishnaswamy
- G.J. Collins
- et al.
- 1989
- Proceedings of SPIE 1989
- J. Krishnaswamy
- Mark Eyolfson
- et al.
- 1989
- Proceedings of SPIE 1989
- 1989
- Proceedings of SPIE 1989
- 1989
- Proceedings of SPIE 1989
- Jayaram Krisinaswamy
- Lumin Li
- et al.
- 1989
- Proceedings of SPIE 1989
- 1986
- Microlithography 1986
- 1983
- ACS National Meeting 1983