Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Field effect transistors are reaching the limits imposed by the scaling of materials and the electrostatic gating physics underlying the device. In this Communication, a new type of switch based on different physics, which combines known piezoelectric and piezoresistive materials, is described and is shown by theory and simulation to achieve gigahertz digital switching at low voltage (0.1 V). Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Hiroshi Ito, Reinhold Schwalm
JES