High spatial resolution infrared emission thermal measurement of laser-induced chemical vapor deposition

Abstract

Infrared emission radiometry was used as a noncontact temperature probe with a tens of micron spatial resolution for monitoring laser-induced chemical vapor deposition (LCVD). With appropriate calibration of the emissivity, a temperature of 255±15°C was measured during gold LCVD from dimethylhexafluoroacetylacetonate gold (III). Equivalent deposition temperatures were calculated for both continuous and modulated laser illumination. Depending on the deposition conditions, material deposited with a modulated laser beam varied from notably worse (due to stress cracking) to notably better (more uniform growth morphology) than material deposited with continuous laser illumination.