Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A new method is described for rapid and accurate calculation of the time evolution of non-equilibrium electron distributions by application of high-order integration procedures directly to the Boltzmann equation in a transformed and discretized representation. The method has been checked for a soluble model and detailed results are given for a model of p-Ge. © 1971.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010