William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
In the amorphous-to-crystalline phase transformation of thin film CoSi2, all grain boundaries in the crystalline microstructure viewed in projection have the shape of a hyperbola. This is due to the continuous nucleation and constant growth rate which gives circular CoSi2 grains before impingement. Such a mode of transformation results in a macroscopic nonequilibrium state at the triple points where a grain boundary meets two amorphous-to-crystalline interfaces. © 1987 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Mark W. Dowley
Solid State Communications