Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
In the amorphous-to-crystalline phase transformation of thin film CoSi2, all grain boundaries in the crystalline microstructure viewed in projection have the shape of a hyperbola. This is due to the continuous nucleation and constant growth rate which gives circular CoSi2 grains before impingement. Such a mode of transformation results in a macroscopic nonequilibrium state at the triple points where a grain boundary meets two amorphous-to-crystalline interfaces. © 1987 The American Physical Society.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Microelectronic Engineering
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