Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The underlying mechanisms of image distortions in atomic force microscopy (AFM) with CO-terminated tips are identified and studied in detail. AFM measurements of a partially fluorinated hydrocarbon molecule recorded with a CO-terminated tip are compared with state-of-the-art ab initio calculations. The hydrogenated and fluorinated carbon rings in the molecule appear different in size, which primarily originates from the different extents of their π-electrons. Further, tilting of the CO at the tip, induced by van der Waals forces, enlarges the apparent size of parts of the molecule by up to 50%. Moreover, the CO tilting in response to local Pauli repulsion causes a significant sharpening of the molecule bonds in AFM imaging.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter