G.C. Hill, J.I. Padovani, et al.
MEMS 2011
A high-sensitivity fiber-optic displacement sensor for atomic force microscopy is described. The sensor is based on the optical interference occurring in the micron-sized cavity formed between the cleaved end of a single-mode optical fiber and the microscope cantilever. As a result of using a diode laser light source and all-fiber construction, the sensor is compact, mechanically robust, and exhibits good low-frequency noise behavior. Peak-to-peak noise in a dc to 1 kHz bandwidth is less than 0.1 Å. Images are presented demonstrating atomic resolution of graphite and magnetic force imaging of bits written on a magnetic disk.
G.C. Hill, J.I. Padovani, et al.
MEMS 2011
B.D. Terris, R.C. Barrett, et al.
SPIE OE/LASE 1993
D. Rugar, R. Budakian, et al.
SPIE International Symposium on Fluctuations and Noise 2003
B.D. Terris, S. Rishton, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures