David B. Mitzi
Journal of Materials Chemistry
In this paper we present a non-linear control scheme for high-speed nanopositioning based on impulsive control. Unlike in the case of a linear feedback controller, the controller states are altered in a discontinuous manner at specific instances in time. Using this technique, it is possible to simultaneously achieve good tracking performance, disturbance rejection and tolerance to measurement noise. Impulsive control is demonstrated experimentally on an atomic force microscope. A significant improvement in tracking performance is demonstrated. © 2011 IOP Publishing Ltd.
David B. Mitzi
Journal of Materials Chemistry
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Imran Nasim, Melanie Weber
SCML 2024
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films