William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Selective Chemical Vapor Deposition of Crystalline Ge-Sb-Te alloys initiating at the bottom metal contact of vias of various sizes has been accomplished. The method is based on selecting Sb and Te precursors which do not decompose on dielectric surfaces in the utilized temperature range. © 2010 Materials Research Society.
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics