Cu CMP edge uniformity improvement studies for 32 nm technology node and beyond
- John H. Zhang
- Laertis Economikos
- et al.
- 2010
- MRS Online Proceedings Library
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12 results at MRS Online Proceedings Library
Effect of TaN stoichiometry on barrier oxidation and defect density in 32nm Cu/ultra-low K interconnects
- Andrew H. Simon
- Frieder Baumann
- et al.
- 2010
- MRS Online Proceedings Library
Fabrication of prototype magnetic coupled spin-torque devices for non-volatile logic applications
- Larkhoon Leem
- James S. Harris
- et al.
- 2010
- MRS Online Proceedings Library
Reducing time dependent line to line leakage following post CMP clean
- Donald F. Canaperi
- Satyavolu S. Papa Rao
- et al.
- 2010
- MRS Online Proceedings Library
Epitaxial Dy2O3 thin films grown on Ge(100) substrates by molecular beam epitaxy
- Md. Nurul Kabir Bhuiyan
- Mariela Menghini
- et al.
- 2010
- MRS Online Proceedings Library
Influence of bottom contact material on the selective chemical vapor deposition of crystalline GeSbTe alloys
- Alejandro G. Schrott
- Chieh-Fang Chen
- et al.
- 2010
- MRS Online Proceedings Library
Amorphization of crystalline phase change material by ion implantation
- Simone Raoux
- Guy M. Cohen
- et al.
- 2010
- MRS Online Proceedings Library
The effect of forming gas annealing on Pt/(Ba,Sr)TiO3/Pt thin film capacitors for future dram applications: Electrical properties and degradation mechanisms
- J.D. Baniecki
- C. Parks
- et al.
- 2001
- MRS Online Proceedings Library
Electrodes and barriers for dram and feram: Processing, integration, and fundamentals
- K.L. Saenger
- P.C. Andricacos
- et al.
- 2001
- MRS Online Proceedings Library
Micro-wear scan test on the carbon overcoats as thin as 6 nm or less
- T.W. Wu
- Thomas W. Scharf
- et al.
- 2000
- MRS Online Proceedings Library