U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
A simple phenomenological theory of alloy sputtering is developed which suggests that in some instances the depth resolution of depth profiling measurements is limited by the time it takes to create a layer of altered chemical composition at the surface.
U. Gerlach-Meyer, J.W. Coburn, et al.
Surface Science
Harold F. Winters
The Journal of Chemical Physics
Harold F. Winters
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
K. Kehler, J.W. Coburn, et al.
JVSTA