V.P. Kesan, P.G. May, et al.
IEDM 1990
Paper
Ink jet printing nozzle arrays etched in silicon
Abstract
Ink jet printing nozzle arrays in the form of truncated pyramidal holes anisotropically etched into a silicon substrate have been fabricated. Eight-nozzle arrays dixplay excellent performance characteristics with regard to uniformity of direction (<± 1mra), velocity (<± 10 cm/sec) at 1000-3000 cm/sec), and drop formation.
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