Paper1 µm MOSFET VLSI Technology: Part VI― Electron-Beam LithographyWarren D. Grobman, Hans E. Luhn, et al.IEEE JSSC
PaperDesign and Experimental Technology for 0.1-μm Gate-Length Low-Temperature Operation FET'sGeorge A. Sai-Halasz, Matthew R. Wordeman, et al.IEEE Electron Device Letters
PaperThe interior of a whole and unmodified biological object - the zymogen granule - viewed with a high-resolution X-ray microscopeS. Rothman, N. Iskander, et al.BBA - General Subjects
Conference paperElectron beam testing and its application to packaging modules for very large scale integrated (vlsi) chip arraysF.J. Hohn, T.H.P. Chang, et al.Proceedings of SPIE 1989
