Y. Vladimirsky, D. Kern, et al.
Nuclear Inst. and Methods in Physics Research, A
Paper
Instrumentation for electron beam lithography
Abstract
No abstract available.
Related
T.H.P. Chang
Japanese Journal of Applied Physics
H. Rarback, D. Shu, et al.
Review of Scientific Instruments
H.N. Yu, R.H. Dennard, et al.
ISSCC 1973