William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures