Chemical and physical aspects of multilayer resist processing
- J. Paraszczak
- E. Babich
- et al.
- 1989
- Proceedings of SPIE 1989
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29 results for N.J. Chou
On the Nature of CVD Si-Rich SiO2 and Si3N4 Films
- E.A. Irene
- N.J. Chou
- et al.
- 2019
- JES
An XPS and TEM Study of Intrinsic Adhesion Between Polyimide and Cr Films
- N.J. Chou
- D.W. Dong
- et al.
- 2019
- JES
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2014
- Japanese Journal of Applied Physics
Auger analysis of thin oxide films on Pb-In alloys
- N.J. Chou
- S.K. Lahiri
- et al.
- 2008
- The Journal of Chemical Physics
Computer-controlled Auger spectrometer
- N.J. Chou
- R. Hammer
- et al.
- 2008
- Review of Scientific Instruments
Optical isolation operational amplifier
- N.J. Chou
- A. Castellano
- 2008
- Review of Scientific Instruments
Effect of O+ and Ne+ implantation on the surface characteristics of thermally oxidized Si
- N.J. Chou
- B.L. Crowder
- 2003
- Journal of Applied Physics
Auger analysis of chlorine in "hCl- or Cl2-grown" SiO2 films
- N.J. Chou
- C.M. Osburn
- et al.
- 2003
- Applied Physics Letters
Auger and ellipsometric study of phosphorus segregation in oxidized degenerate silicon
- N.J. Chou
- Y.J. Van Der Meulen
- et al.
- 2003
- Applied Physics Letters