W.K. Chu, M. Numan, et al.
Nuclear Inst. and Methods in Physics Research, B
W.K. Chu, M. Numan, et al.
Nuclear Inst. and Methods in Physics Research, B
Alwin E. Michel, R.H. Kastl, et al.
Nuclear Instruments and Methods In Physics Research
Alwin E. Michel, W. Rausch, et al.
Applied Physics Letters
Alwin E. Michel
Symposium on Process Physics and Modeling in Semiconductor Technology 1990