K. Jain, S. Rice, et al.
Polymer Engineering & Science
Hysteresis in piezoelectric transducers down to 20 Å and gas pressure changes as small as 10 mTorr are measured by locking a laser FM sideband to an interferometer resonance. In addition, rapid monitoring of large excursion motions with 200-Å accuracy is achieved using an "optical frequency comb" consisting of multiple FM sidebands.
K. Jain, S. Rice, et al.
Polymer Engineering & Science
G.C. Bjorklund, W. Lenth, et al.
Proceedings of SPIE 1989
J.I. Thackara, G.C. Bjorklund, et al.
SPIE Optics, Imaging, and Instrumentation 1993
G.H. Hewig, K. Jain, et al.
Thin Solid Films