(Invited) FinFET technology

Abstract

This paper provides an overview of FinFET technology, including its unique advantages and challenges in device design and fabrication. Common myths on FinFET are clarified. A methodology to decipher the confusing FinFET technology node names is shared. Potential solutions to further scaling FinFET are discussed. The comparison between FinFET and other existing and emerging devices and materials is performed from manufacturing perspectives.