Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The extent of imidization was determined as a function of depth in films of the deuterated version of a model polyimide precursor, polyamic ethyl ester (d-PAE), using a novel ion beam analysis technique. Monitoring the loss of the deuterated ethyl moiety provided a precise means of evaluating the extent of imidization f as a function of the temperature of imidization and time at the imidization temperature. The imidization reaction was found to proceed uniformly as a function of depth down to 700 nm below the surface. The imidization kinetics followed a two-stage sequence in which the initial rate of imidization was rapid, up to f values of ca. 0.6, whereupon the reaction rate diminished sharply. © 1990.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials