Effects of environment on modulus of low-k porous films used in back end of line
- Eva E. Simonyi
- Christos D. Dimitrakopoulos
- et al.
- 2007
- MRS Spring Meeting 2007
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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156 results for Willi Volksen
Successful dual damascene integration of extreme low k materials (k < 2.0) using a novel gap fill based integration scheme
- S.V. Nitta
- S. Purushothaman
- et al.
- 2004
- IEDM 2004
Stability and performance issues for nonlinear optical chromophores, polymers and devices
- R.J. Twieg
- D.M. Burland
- et al.
- 1995
- MRS Spring Meeting 1995
Polyimide nanofoams for low dielectric applications
- K.R. Carter
- H.J. Cha
- et al.
- 1995
- MRS Spring Meeting 1995
Progress on nonlinear optical chromophores and polymers with useful nonlinearity and thermal stability
- R.J. Twieg
- D.M. Burland
- et al.
- 1993
- MRS Fall Meeting 1993
Polyimides with reduced dielectric anisotropy
- Jeff W. Labadie
- H. Lee
- et al.
- 1993
- ECTC 1993
Base-catalyzed photosensitive polyimide
- D.R. McKean
- G.M. Wallraff
- et al.
- 1991
- ACS Spring 1991
Base-catalyzed cyclization of ortho-aromatic amide-alkyl esters: a novel approach to chemical imidization
- W. Volksen
- T. Pascal
- et al.
- 1991
- ACS Spring 1991
Fundamental limits of material toughening in molecularly confined polymers
- Scott G. Isaacson
- Krystelle Lionti
- et al.
- 2015
- Nature Materials
Application of the protection/deprotection strategy to the science of porous materials
- Theo Frot
- Willi Volksen
- et al.
- 2011
- Advanced Materials