A. Blacha, R. Clauberg, et al.
Journal of Applied Physics
The development of VLSI circuits calls for special design techniques and failure analysis. A laser-beam based contactless photoemission test method was developed for high-sensitivity voltage measurements of very fast signals at interior lines and junctions of such circuits. Features of the method are pointed out.
A. Blacha, R. Clauberg, et al.
Journal of Applied Physics
H.K. Seitz, A. Blacha, et al.
European Test Conference 1989
A. Blacha, R. Clauberg, et al.
Advances in Semiconductors and Semiconductor Structures 1987
R. Clauberg, A. Blacha, et al.
Advances in Semiconductors and Semiconductor Structures 1987