Laser energy deposition at sapphire surfaces studied by pulsed photothermal deformation

R.W. Dreyfus; F.Alan McDonald; R.J. Von Gutfeld

doi:10.1063/1.97809

Applied Physics Letters

Paper

01 Dec 1987

Laser energy deposition at sapphire surfaces studied by pulsed photothermal deformation

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Abstract

A surface deformation technique measures the energy deposited in sapphire surfaces irradiated by focused excimer laser light. The absorbed energy creates ≲3 electron-hole pairs/oxygen atom, consistent with a photochemical etching mechanism.

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