David B. Mitzi
Journal of Materials Chemistry
The reaction behavior of Cu, Ag and Au exposed to Cl2 and the laser stimulated desorption (chemical etching) of the chlorinated surfaces have been studied. The desorption yields and the mass and velocity distributions of desorbed particles due to irradiation by visible and ultraviolet laser pulses are determined by time-of-flight mass spectrometry. The study reveals desorption mass distributions very different from the thermal process and the desorbed atomic and molecular species possessing very high kinetic energies. The possible electronic excitation mechanisms are discussed. © 1986.
David B. Mitzi
Journal of Materials Chemistry
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008