Learning Reduced Order Dynamics via Geometric Representations
Imran Nasim, Melanie Weber
SCML 2024
The conformality of thin metal films (liners) formed on high-aspect-ratio trench structures in ionized magnetron sputter deposition processes is studied numerically and experimentally. The numerical simulator (SHADE) used to predict the surface topography is based on the shock-tracking method for surface evolution. The simulation results are in good agreement with experimentally observed thin-film topography. It is shown that combination of direct deposition and trench-bottom resputtering results in good conformality of step coverages and the amount of the resputtering needed for the good conformality is almost independent of trench aspect ratios. © 1996 American Vacuum Society.
Imran Nasim, Melanie Weber
SCML 2024
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997