Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Properties of liquid arsenic are calculated by molecular-dynamics simulations using both ab initio local-density functional theory and pair potentials based on second-order perturbation theory. Radial distribution functions from both procedures compare well with experiment, in spite of small but significant differences in short-range order between the two calculations. Coordination is predicted to evolve from three-fold to six-fold when density is increased, and optical properties are predicted. © 1990 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.C. Marinace
JES
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990