Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Exposure of surfaces to the reaction products of an rf plasma induces specific aligning properties for smectic and nematic liquid crystals. Oxygen etched indium-tin oxide (ITO) films and surfaces on which SiO2 or SnO2 is deposited show strong parallel alignment. ITO surfaces exposed to a CF4 plasma or surfaces on which a polyfluorocarbon film is deposited by a C2F4 plasma show strong perpendicular alignment. © 1977, The Electrochemical Society, Inc. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Eloisa Bentivegna
Big Data 2022
Michiel Sprik
Journal of Physics Condensed Matter