Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
The mean-Field dynamics of a collection of stochastic agents evolving under local and nonlocal interactions in one dimension is studied via analytically solvable models. The nonlocal interactions between agents result from (a) a Finite extension of the agents interaction range and (b) a barycentric modulation of the interaction strength. Our modeling framework is based on a discrete two-velocity Boltzmann dynamics which can be analytically discussed. Depending on the span and the modulation of the interaction range, we analytically observe a transition from a purely diffiusive regime without deFinite pattern to a ocking evolution represented by a solitary wave traveling with constant velocity.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Salvatore Certo, Anh Pham, et al.
Quantum Machine Intelligence
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Andrew Skumanich
SPIE Optics Quebec 1993