Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

01 Jan 1988

Low-energy neutral/ion backscattering at As/Si(001)

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Abstract

No abstract available.

Conference paper

Modeling polarization for Hyper-NA lithography tools and masks

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SPIE Advanced Lithography 2007

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Physica E: Low-Dimensional Systems and Nanostructures

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(S)PEEC: Time- and Frequency-Domain Surface Formulation for Modeling Conductors and Dielectrics in Combined Circuit Electromagnetic Simulations

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IEEE T-MTT

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Hierarchical hydrodynamic flow confinement: Efficient use and retrieval of chemicals for microscale chemistry on surfaces

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