O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14 aspect ratios in resist were demonstrated.
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989