Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14:1 aspect ratios in resist were demonstrated.
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001