A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Paper
Low stress development of poly(methylmethacrylate) for high aspect ratio structures
Abstract
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14 aspect ratios in resist were demonstrated.
Related
R.W. Gammon, E. Courtens, et al.
Physical Review B
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano