J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Magnetic head requirements for high aspect ratio pole tips were met using single-layer PMMA exposed at 100 kV. Using cooled mixtures of IPA and water and ultrasonic agitation, 14 aspect ratios in resist were demonstrated.
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Michiel Sprik
Journal of Physics Condensed Matter
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings