Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A model for the lowest-order optical nonlinearity in InSb is presented. A method for ensuring the cancellation of sizeable contributions throughout the Brillouin zone is incorporated in the model. A calculation, based on the band structure of InSb at k=0, successfully accounts for the dispersion of the optical nonlinearity near the band gap, measured by a second-harmonic-generation (SHG) experiment in InSb. General results are also presented on the interpretation of SHG measurements in absorbing media, with special attention devoted to interference experiments. From a comparison of the experimental dispersion with the theory, values are obtained for momentum matrix elements near k=0. © 1972 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
Robert W. Keyes
Physical Review B