Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Several new CoNbB amorphous and microcrystalline alloys have been melt quenched and their magnetic moments measured. Comparison is made with cobalt moment suppression in CoB, CoNb, CoV and other CoNbB alloys. Two issues are addressed: 1) the different rates at which Nb and V (same number of valence electrons) suppress the cobalt moment and 2) the combined effect of boron and niobium together in suppressing the cobalt moment. It is suggested that the characteristic moment variations can be accounted for by d-d hybridization in the first case and by p-d and d-d hybridization in the second case. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
William G. Van der Sluys, Alfred P. Sattelberger, et al.
Polyhedron
Imran Nasim, Melanie Weber
SCML 2024