Alina Deutsch, Gerard V. Kopcsay, et al.
IEEE T-MTT
Paper
Measurement of VLSI Power Supply Current by Electron-Beam Probing
Abstract
The measurement of power supply noise and current by electron-beam probing is described. Noise measurements can be made on the chip under test, and current measurements can be made on the circuit board. © 1992 IEEE
Related
Joachim N. Burghartz, Jean-Olivier Plouchart, et al.
IEEE Electron Device Letters
Mark B. Ketchen, Manjul Bhushan, et al.
IEEE International SOI Conference 2005
Conference paper
Electrical characterization of 3D Through-Silicon-Vias
Fei Liu, Xiaoxiong Gu, et al.
ECTC 2010