X. Yang, Kingsuk Maitra, et al.
IEEE International SOI Conference 2011
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
X. Yang, Kingsuk Maitra, et al.
IEEE International SOI Conference 2011
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012
J.S. Evans, P.L. Kinney, et al.
Journal of the Air Pollution Control Association
Douglas W. Cooper
Journal of Aerosol Science