Douglas W. Cooper, H.L. Wolfe
Aerosol Science and Technology
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
Douglas W. Cooper, H.L. Wolfe
Aerosol Science and Technology
Masahide Terazima, Noboru Hirota, et al.
Pure and Applied Chemistry
R.J. Miller, Douglas W. Cooper
Annual Technical Meeting of Institute of Environmental Sciences 1989
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012