H. Kawasaki, M. Khater, et al.
IEDM 2008
Paper
Measurements with condensation nucleus counters and an optical particle counter in a cleanroom
Abstract
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
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