William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The formation of a metastable phase in Al59Ge41 thin films under microsecond laser irradiation is reported. Thin films prepared by co-sputtering are amorphous as-grown. Upon laser processing, amorphous and crystalline phases are detected and analysed using TEM and EDX. A metastable structure formed by laminar-textured aluminium alternating with an hexagonal metastable phase is observed. © 1987 Chapman and Hall Ltd.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications