Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
We have investigated hydrogenated amorphous carbon at a density (2.6 g/cm3) and H content (16%) corresponding to hard films, by means of first-principles molecular dynamics. Our computer-generated sample consists of about 55% fourfold- 40% threefold- and a small fraction of twofold-coordinated carbon sites, in agreement with recent measurements. All H atoms are bonded to C; a great majority of them is bonded to C atoms linked to three other carbons, giving rise to C4-H units, and thus promoting sp3 bonding. Only monohydrated C sites are found in our simulation. Our results for total and partial correlation functions compare well with those obtained in neutron-scattering experiments. © 1994 The American Physical Society.
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting