George Chiu, Jean-Marc Halbout, et al.
Microelectronic Engineering
Paper
Modal Dispersion and Attenuation Measurements of Silicon Nitride and Silicon Oxynitride Waveguides Using a Streak Camera
Abstract
Attenuation and dispersion characteristics for different modes of dielectric waveguides fabricated on silicon have been characterized by measuring the propagation of short pulses using a synchroscan streak camera. © 1990, IEEE
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