P. Santhanam, C.C. Chi, et al.
Physical Review B
An ion gun has been modified to operate in a continuously pumped mode, in which gas is leaked directly into the ionization region, and the vacuum system is pumped to ∼10-7 Torr Ar by a helium cryopump. A milling rate of 3.8 Å/sec was obtained for SiO2 using 2 keV Ar ions. Sample to gun distance was 5 cm. This may be compared with the rate 0.8 Å/sec, obtained when operating in a static vacuum of 5×10-5 Torr Ar.
P. Santhanam, C.C. Chi, et al.
Physical Review B
D.J. Robbins, C. Falcony, et al.
IEEE Electron Device Letters
T.C. Chicu, K.K. Shih, et al.
Microlithography 1994
S.I. Tan, R. Lane, et al.
Proceedings of SPIE 1989