Keith A. Jenkins, J.P. Eckhardt
Electronics Letters
Multilevel monolithic inductors implemented in a standard BiCMOS technology are presented. Use of top metal layers shunted with vias provides Q values approaching 10 at 2.4GHz and above 6 at 900MHz for a 2nH inductor. There is no modification to the conventional wiring metallurgy and no need for extra processing steps. © 1995, IEE. All rights reserved.
Keith A. Jenkins, J.P. Eckhardt
Electronics Letters
D. Singh, Keith A. Jenkins, et al.
Electronics Letters
W.H. Henkels, N.C.-C. Lu, et al.
VLSI Circuits 1989
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ISSCC 1996