Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present a new continuation method for computing implicitly defined manifolds. The manifold is represented as a set of overlapping neighborhoods, and extended by an added neighborhood of a boundary point. The boundary point is found using an expression for the boundary in terms of the vertices of a set of finite, convex polyhedra. The resulting algorithm is quite simple, allows adaptive spacing of the computed points, and deals with the problems of local and global overlap in a natural way. The algorithm is robust (the new points need only be near the boundary), and is well suited to problems with large embedding dimension, and small to moderate dimension.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ruixiong Tian, Zhe Xiang, et al.
Qinghua Daxue Xuebao/Journal of Tsinghua University
James Lee Hafner
Journal of Number Theory
Zhengxin Zhang, Ziv Goldfeld, et al.
Foundations of Computational Mathematics