Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Thin films of an ordered polystyrene-polymethyl(methacrylate) (PS-PMMA) diblock copolymer was formed over full 8-in.-diam silicon wafers and on various substrate materials. The important process parameters for forming the nanoscale templates were analyzed. It was found that under proper conditions, well-ordered hexagonal arrays of sub-20 nm domains can be formed on a tight pitch.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Frank Stem
C R C Critical Reviews in Solid State Sciences
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
J.H. Stathis, R. Bolam, et al.
INFOS 2005