Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We describe the formation of nematic mesophases by rigid rod polytolans. Because the clearing points lie well below the degradation temperatures, these materials are useful for experimental study of how molecular axial ratio affects crystal-nematic and nematic-isotropic transition temperatures. © 1990 Taylor & Francis Group, LLC.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films