The DX centre
T.N. Morgan
Semiconductor Science and Technology
The tremendous variety of nanotechnology experiments and tools to fabricate and characterize ever-smaller structures down to molecular or even atomic scales leads to stringent demands for appropriate, so-called "silent", premises that allow such susceptible experiments to be conducted. Reducing dimensions means smaller absolute optical and electrical signal levels, and consequently reduced signal-to-noise ratios. Hence, in addition to short-range disturbances inside the laboratory, remote long-range noise sources have to be considered for next-generation laboratories that aim at screening the disturbances and keeping the remaining values at utmost constancy. We present a novel laboratory concept that addresses simultaneously all the disturbances relevant for nanotechnology, namely, vibrations, electro-magnetic fields, temperature, humidity, and sound. Particular attention was paid to tackling the mutual derogation of the various measures to enable unprecedented performance of the novel research platform. © 2013 The Royal Society of Chemistry.
T.N. Morgan
Semiconductor Science and Technology
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
R. Ghez, M.B. Small
JES
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009